Used TEL / TOKYO ELECTRON SCCM Shin #9235174 for sale
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ID: 9235174
Wafer Size: 12"
Vintage: 2007
Dry etcher, 12"
Process: Metal
2007 vintage.
TEL / TOKYO ELECTRON SCCM Shin is an etcher/asher (also known as plasma etching machine) designed to provide a highly accurate and cost-effective process for the micro-fabrication of various materials. It is capable of handling a wide range of materials, including stainless steel, tungsten, cobalt, aluminum, quartz, and silicon. The system utilizes a combination of Plasma Etching technology, which uses a high-energy plasma to strip material away from the wafer surface, and an integrated milling process, which uses a specially designed machine head to define various shapes. TEL SCCM Shin features a large plate, which can hold a wafer up to 200 millimeters in diameter and 1.5 millimeters thick. The plate is then attached to a lower plate, which is heated. A computerized system allows for precise control of the process. The etching process is initiated, and the wafer is subjected to a pulsed magnetic field generated by an inductor located in the etch chamber. This field force interacts with the feedstock plasma, creating a focused etching pattern on the wafer's surface. The etch chamber is equipped with several safety features, including an internal vacuum, nitrogen gas, and a deep vacuum. As the plasma etch process is in progress, the wafer is monitored with visual and infrared sensors to ensure that the etch process is uniform. Once the etching process is finished, a special milling process is then performed. The milling process is performed using a specialized milling head which rotates at high speeds, cutting the wafer along predetermined contours. The milling process is used to create channels or other features in the wafer. Finally, the part is ready to be inspected and packaged. The inspection process is conducted through a specialized microscope, which is able to identify cracks, scratches, and other imperfections in the final product. If any of these problems are detected, they can be fixed prior to shipping. The part can then be packaged and dispatched to its final destination. Overall, TOKYO ELECTRON SCCM Shin is a reliable and cost-effective system for micro-fabrication processes. It is designed to provide a high degree of accuracy and precision, while still being easy to operate and maintain. Additionally, its built-in safety features ensure that the process is conducted in a safe, controlled environment.
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