Used TEL / TOKYO ELECTRON SCCM Shin #9238870 for sale

TEL / TOKYO ELECTRON SCCM Shin
ID: 9238870
Dry etcher.
TEL / TOKYO ELECTRON SCCM Shin is a type of etcher/asher used by semiconductor and flat panel display manufacturing companies. It is a equipment designed with high productivity and excellent performance, offering users unique usability. TEL SCCM Shin features a CCS (Closed Chamber System) chamber which keeps the process hazardous materials separated from the interior of the etcher. This ensures a safe working environment, while reducing odor and generation of particles. Additionally, its patented Dual-platen design enables maximum manufacturing efficiency. TOKYO ELECTRON SCCM Shin is equipped with two independent platen systems, making it suitable for performing etch operations on large numbers of wafers. It can process up to nine wafers simultaneously in a single operation, increasing process yield and throughput. The unit also offers a variety of process flexibility by providing optional substrates such as silicon wafers, post-metallized substrates, and resist coated substrates. Furthermore, the machine has an energy saving mode, which allows it to reduce power consumption during inactive periods and idle times. SCCM Shin etcher has a wafer transport tool with two separate arms, one for feeding and one for loading. This enables quick substrate changeover and enables a single tool to be used for processing both production and test wafers with shorter wafer changeover times. The asset is also equipped with an auto-cassette changer which stores up to sixteen wafers at a time, freeing operators from manual loading and unloading operations. The etcher/asher is also user friendly and offers simplified operations with minimal maintenance. Its design makes it easy to integrate into existing production lines and it is suitable for remote operation and onsite support. Furthermore, TEL / TOKYO ELECTRON SCCM Shin is compliant with SEMI standards and is capable of transferring and sharing data with other manufacturing systems such as the Automation Platform Server. This makes it simple to monitor production statistics, enabling users to improve the efficiency of the entire production process. In summary, TEL SCCM Shin etcher/asher is a high-performance model designed with the user in mind. It offers excellent process flexibility, allowing users to quickly change over substrates and reduce process yield and throughput. Furthermore, its user friendly design makes it easy to integrate into existing production lines and is compliant with SEMI standards, enabling effective data sharing and data transfer. Overall, TOKYO ELECTRON SCCM Shin is the perfect tool for increasing productivity and ensuring safety for semiconductor and flat panel display manufacturers.
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