Used TEL / TOKYO ELECTRON SCCM Shin #9271008 for sale

TEL / TOKYO ELECTRON SCCM Shin
ID: 9271008
Vintage: 2007
Dry etcher 2007 vintage.
TEL / TOKYO ELECTRON SCCM Shin Etcher/Asher is a highly reliable and accurate equipment for chemical etching and ashing processes. It is an extremely durable, multi-functional system that includes two chambers and three tanks. This unit is ideal for applications requiring fast, reliable, and precise etching and ashing of a variety of substrates. The first chamber of the machine is a track-type tool, equipped with a transport unit and two processing chambers, which is ideal for both etching and ashing processes. This chamber utilizes a two-tank asset, with one tank for processing, and the other tank for residue collection. The model is also equipped with its own cooling unit, allowing for stable and uniform cooling during the etching and ashing process. The second chamber is an electrochemical etching/ ashing chamber, offering a wide range of adjustable parameters for precise etching of various substrates. This chamber is equipped with an electrostatic chuck, allowing for a high degree of control over the etching and ashing process. The run time of the electrochemical etching/ ashing process is reduced significantly by using this feature. The third tank of TEL SCCM Shin Etcher/Asher is used to collect the residues produced during the etching and ashing process. This tank is equipped with a filter and centrifugation equipment, allowing for efficient collection and segregation of particles by size. In addition, a nitrogen supply system is also included for gas-assisted etching of some specific substrates. TOKYO ELECTRON SCCM Shin Etcher/Asher is a safe and reliable processing unit that can be used in a variety of etching and ashing processes. It offers a wide range of processing parameters and capabilities, allowing for precise control of the etching and ashing process. Additionally, the machine is equipped with its own cooling tool, nitrogen supply asset, and filter and centrifugation model, providing a highly efficient processing equipment that is safe and reliable. In conclusion, SCCM Shin Etcher/Asher is an excellent system for precise etching and ashing processes.
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