Used TEL / TOKYO ELECTRON SCCM Shin #9409053 for sale

TEL / TOKYO ELECTRON SCCM Shin is an advanced etcher or asher that provides sophisticated on-site etching and ashing capabilities for laboratories and research institutions. The equipment is designed to deliver accurate, reproducible etching process that can be used for a variety of applications in semiconductor device fabrication. TEL SCCM Shin is equipped with a wide range of features for precision and reliability. The system features a controllable heating platform that allows for precise substrates temperature and atmosphere control, along with easy access to loading substrates. It also has an intuitive user interface that enables fast parameter setting and process monitoring. An advanced process control unit (ACS) enables precise etching process control and parameter setting, compatible with both wet and dry etching processes. In addition, TOKYO ELECTRON SCCM Shin features an automatic gas flow machine that facilitates gas loading, eliminating pressure and temperature errors. This tool is also equipped with a cooling unit that ensures optimal cooling of the etching chamber and its environment. Both the gas flow and cooling systems are controlled by independent closed-loop controllers that provide precise temperature and pressure control. For automation, the asset supports multiple (up to ten) reactions on up to three separate load locks. The model also offers in situ measurement of etching rate, utilizing laser interferometry to measure etching depth at three points per sample. This provides an accurate real-time feedback for etching process control. In addition, the equipment features an in situ residue/recrystallization detector that allows for in situ monitoring of etching rate and detection of any residue or recrystallization during etching. SCCM Shin is a single-chamber, vertical etcher/asher system, designed for process yields and dependability. It offers outstanding process control, flexibility, and automation, which makes it an excellent choice for etching and ashing applications.