Used TEL / TOKYO ELECTRON SCCM Shin #9409127 for sale
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TEL / TOKYO ELECTRON SCCM Shin is an etcher and asher equipment that is used in many industries and facilities. This system is used in the production and etching of thin film devices, thin film layers, and other wafer related materials. It is characterized by its high precision, low power expenditure, and low waste production. It is well-suited for use in semiconductor, micromachining, photomask and other thin film deposition processes where the thin film needs to be etched or ashed at high temperatures. The etching/ashing process begins with the thin film being placed in TEL SCCM Shin etcher/asher unit. This machine consists of a reactor chamber that is equipped with a gas inlet, outlet, and internal gas device for controlling gas and temperature in the chamber. The thin film is then exposed to a mixture of oxygen, nitrogen and other gases at temperatures of 400 to 500 degrees Celsius. The energy is then supplied to the tool's reaction chamber while the x-ray source is used to selectively etch the thin film layer. The etch and ashing process is extremely controlled and accurate, with minimal substrate damage and thin film thinning. The thin film layer can be up to 15-20mm in thickness, but it is possible to etch thinner layers with TOKYO ELECTRON SCCM Shin as well. In addition, this asset can etch a variety of topologies, such as uniform layer etching, stepped layer etching or multi-layer etching. The model has two types of wafer support, manual and auto. The manual wafer support allows the user to manually place the thin film in the etcher equipment. On the other hand, the auto wafer support allows the control computer to automatically feed the thin film into the etcher. In addition, the system is equipped with a variety of safety features such as over temperature protection, over pressure protection, and carbon monitoring. Furthermore, the unit also comes with a variety of operational features such as an automated recipe mode, user interface, and process log. With its high precision, low power expenditure, and low waste production, SCCM Shin Etcher/Asher is the perfect machine for precision etching and ashing of thin film.
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