Used TEL / TOKYO ELECTRON SCCM TE #9235809 for sale
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TEL / TOKYO ELECTRON SCCM TE is an advanced etcher/asher specifically designed for high-precision, high-throughput wafer fabrication needs. This tool is built with a number of features to ensure a precise processing process - for example, its counterbalance mechanism prevents the wafer from shifting, vibrating, or otherwise being damaged while in the etching chamber. Additionally, the machine's power control equipment protects the wafers from over-etching. TEL SCCM TE is outfitted with an advanced gas delivery and control module capable of multi-gas control. The etcher maintains a unique chemical environment in the substrate chamber by controlling the gas supply amount, so that etching can be accurately performed. Moreover, its fast-acting, high-power single-wafer etch source enables the etcher to precisely etch structures in a short time. The required process time can be minimized by using two-step etching. The etcher comes with a fully automated loading arm, ensuring accurate and stable loading/unloading of the wafer. It also has a number of effective mechanisms such as an automatic wafer cleaning system, an accurate temperature control unit, and a static elimination machine. An infrared camera is installed to detect subtle wafer and substrate problems, ensuring that the wafer is correctly loaded onto the device and that the etch process is properly carried out. TOKYO ELECTRON SCCM-TE also includes various fault prevention and protection mechanisms. These measures include a lightning protection tool, an alarm asset, a number of safety devices, and a platinum encoder, which enables precise positioning. It also features a fire protection model that is capable of detecting, alerting, and controlling fires. TEL / TOKYO ELECTRON SCCM-TE is an innovative etcher/asher designed for high-volume, high-precision wafer processing. Its advanced technology ensures accuracy, repeatability, and a safe and efficient etch process. It has a number of features to ensure the perfect etching environment, such as a power control equipment, an advanced gas delivery and control module, a fully automated loading arm, and various fault prevention and protection mechanisms.
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