Used TEL / TOKYO ELECTRON SCCM TE #9398277 for sale

TEL (TOKYO ELECTRON) TEL / TOKYO ELECTRON SCCM TE is a full-featured etcher (also known as an asher) specifically designed to meet the exacting standards of the semiconductor industry. As part of TEL / TOKYO ELECTRON Semiconductor Process Equipment lineup, it is the ideal tool for precise microchip etching, providing operational flexibility, accuracy and throughput. As with other TEL equipment, it is built to last and deliver consistent results with minimal maintenance. TEL SCCM TE has a variety of advanced features. It is equipped with a powerful 885MHz (side-wall) RF generator that can provide a wide range of frequencies from 100 kHz to 22GHz. For precise etching, the unit features an optional High-performance, High-accuracy Load Matching Network (LMN) for precise impedance matching to the substrate for maximum power transfer efficiency. The LMN also allows for wide-range active operating frequency and source matching with almost no distortion. In addition, TOKYO ELECTRON SCCM-TE features a 4-channel slidecabinet turntable, allowing for unexpected versatility in managing various etching configurations for multiple substrates. Variable-speed reaction ball motors provide smooth, low-vibration reticle rotation and precise movement when accelerating or decelerating. The unit also has an ergonomic design, featuring an adjustable operator console, touch-screen interface and a spacious resolution table. SCCM TE also includes a built-in vertical transport system (VTS) that eliminates reticle hanging and stacking, resulting in improved productivity and throughput. The VTS also enables 4-way rotation of substrates up and down, left and right. Moreover, the solutions come with an optional MEMS chuck, line heater and OES (optical emissive system) sensors for precise sensing of etching parameters like temperature and substrate profile. Furthermore, TOKYO ELECTRON SCCM TE is outfitted with software that allows for speeding up the etching process by predicting the end point of etching, monitoring the motion via CCD sensor, and displaying the process history. Its intuitive, user-friendly controls and operational flexibility offer a great degree of production customization. As such, it can be used to complete jobs more efficiently and accurately and improve overall productivity. TEL SCCM-TE is highly rated in the semiconductor industry, with a reputation for reliable results, speed and accuracy. Therefore, it is an excellent choice for etching delicate components and semiconductor chips. Its advanced features and capabilities make it a great asset for companies needing to perform precise etching or substrate-specific operations.