Used TEL / TOKYO ELECTRON T-3055SS #9038420 for sale
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ID: 9038420
SCCM Shin etchers, 12"
(4) Load ports
Type of carrier: Foup 25 Wafers
Process: Oxide Etch
Wafer type: 300mm V notch.
Wafer mapping: Yes
FFU(ULPA Filter): >99.9999% 0.12um
Process kit: Shin Kit
Chuck: Ceramic ESC
Generator: Daihan MGA50E , AGA 50B2
Slow & Fast pumping: Yes
Gasline piping type: ARDC
MFC: Unit 8561
MFC Type: Anlog/Digital MFC
MFC control mode: Analog control
Chiller: FST HC308136
Power Line 1:
Rated power input: 200 VAC, 50/60 Hz, 3 Phase, 1 Wire + ground
Main breaker rating: 175 A
Interrupting: 10 kA
Full load amps: 140 A
Ampere rating of largest load: 120 A
Power Line 2:
Rated power input: 200 VAC, 50/60 Hz, 3 Phase, 1 Wire + ground
Main breaker rating: 175 A
Interrupting: 10 kA
Full load amps: 130 A
Ampere rating of largest load: 110 A
2001 vintage.
TEL / TOKYO ELECTRON T-3055SS Etcher/Asher is a high-performance etch/ash process tool that offers outstanding precision and advanced process capabilities. This equipment is used to produce thin films and other materials in processes such as semiconductor fabrication and OLED displays. TEL T-3055SS is a fully automated etch/ash process platform that provides outstanding customization options and precise control over the etch/ash process. The machine offers fast, high-precision etch/ash cycle times of up to 9 seconds depending on the material and the process parameters. TOKYO ELECTRON T-3055SS is equipped with a unique electrode system for etching and ashing that ensures a higher accuracy rate than traditional etching and ashing techniques. The electrode works together with two internal heaters and an adjustable nozzle unit that are capable of maintaining a constant temperature during the etching and ashing process. This allows for efficient and precise etch/ash process control for thin film and other materials. The machine is also equipped with an integrated vision machine that allows for automatic adjustment of the etch/ash process parameters. T-3055SS is designed to make it easy and convenient to perform various processes. The intuitive graphical user interface allows users to set up, monitor, and control the etch/ash process quickly and with minimal effort. The machine also features an optional load-lock to automate sample loading and unloading. This allows for multiple simultaneous processes to take place. TEL / TOKYO ELECTRON T-3055SS is a reliable etch/ash tool for use in high-volume production. It is available with a wide range of process and option packages that can be customized to fit any specific needs. An integrated process monitoring asset records all program, process, and device data, providing users with longer-term analysis and process optimization. Furthermore, TEL T-3055SS has a secure and reliable operations model that ensures stable performance and provides high degrees of safety and reliability. Overall, TOKYO ELECTRON T-3055SS is an excellent choice for companies looking to maximize the precision and efficiency of the etch/ash process. It offers outstanding automation and customization capabilities while also providing a user-friendly interface and reliable performance.
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