Used TEL / TOKYO ELECTRON T-3055SS #9211146 for sale

TEL / TOKYO ELECTRON T-3055SS is a fully-automated etcher and asher capable of handling a moderately complex process. As a reactive ion etching and asher equipment, TEL T-3055SS offers a complete etch and ashing solution. In addition to etching and ashing, the system can also be used as a deposition machine for thin film processes. TOKYO ELECTRON T-3055SS is designed for production and process applications that require precise and accurate results. It has high throughput and fast cycle times, with a loading capacity of up to 25 wafers per run. The unit uses both RF and DC mixed energy sources for etching, and a high-temperature anneal stage for ashing. It also includes a variable mass flow-activation machine for precise control of process parameters. Using advanced software and hardware components, T-3055SS provides reliable operation for reactive ion etching and ashing. The computer-controlled tool has a user-friendly interface, complete with a graphical display for quick entry and straightforward operation. It also provides extensive diagnostics tools to help troubleshoot and fine-tune processes. TEL / TOKYO ELECTRON T-3055SS utilizes a range of safety features to protect users and prevent damage to the equipment. It uses safety interlocks to protect personnel and equipment, and is designed to meet the safety requirements of the latest regulations governing operation of RF and DC equipment. The asset includes both online and offline in-situ diagnostics capabilities for complete process control. TEL T-3055SS provides extensive process control capabilities, allowing users to control all process parameters for different device types. It comes with flexible scheduling capabilities, so users can easily program multiple parameters for different etching and ashing tasks. It also includes an automatic wafer transfer model, allowing users to move multiple wafers from one chamber to another without any additional equipment. TOKYO ELECTRON T-3055SS is a reliable, highly precise etcher and asher equipment. Its user-friendly interface and extensive process control capabilities make it ideal for a wide range of applications in the semiconductor industry. With its wide range of safety features and extensive diagnostics, T-3055SS offers reliable and accurate results.