Used TEL / TOKYO ELECTRON Tactras BX JIN #293773387 for sale

TEL / TOKYO ELECTRON Tactras BX JIN is a high-performance, compact etching (or ashing) equipment that enables etching and ashing processes used in semiconductor device manufacturing. It is designed to provide reliable process uniformity and repeatability, while enhancing safety and leveraging the latest advancements in etching and ashing technology. The BX JIN etcher / asher utilizes advanced etching chamber designs that offer improved process uniformity and repeatability, resulting in reduced out-sizing and improved results on narrow etched structures. This system also employs high-speed sweep-up, high-temperature bias in RF etch engines for higher through-put in FEOL operations. TEL Tactras BX JIN is also equipped with sophisticated process control technology and a variety of process control systems including Ion Assisted Process Control (IPC), FEOL-based Process Control Unit (FPCS) and process-specific fine-tuning systems that enable users to accurately and precisely control the etching/ashing process. It also features automated process matching systems for accuracy and repeatability, and a water-based cooling machine for etching faster and more safely. In addition, TOKYO ELECTRON Tactras BX JIN offers great flexibility, with a range of process recipes that can be stored for each application, and etching/ashing recipes can be fine-tuned to meet specific requirements. Lastly, this tool provides remote connectivity, enabling users to monitor and adjust etching/ashing parameters to enhance process accuracy with minimal interaction. Combined, these features make Tactras BX JIN one of the most powerful and reliable etcher/asher systems available today. It is an ideal choice for etch/ash operations in the semiconductor industry, providing reliable, repeatable and uniform process results with the highest level of safety and efficiency.