Used TEL / TOKYO ELECTRON Tactras RLSA Poly #293813001 for sale

TEL / TOKYO ELECTRON Tactras RLSA Poly is a highly-advanced etcher designed for etching of polysilicon, poly-SiGe and SiGe layers from GaAs substrates. This eight-creature, self-aligned etcher has been developed by TEL. TEL Tactras RLSA Poly offers high precision and accuracy in etching, making it a widely sought-after etcher for research and development in semiconductor processes. TOKYO ELECTRON Tactras RLSA Poly's unique architecture allows for the etching of complex substrates with unparalleled accuracy and uniformity. This etcher is based on the reactive ion etching (RIE) process, utilizing a combination of various gases, such as oxygen, radicals, and fluorine compounds to effect an etch. However, the RLSA Poly has been developed to enable optimized etching results with improved uniformity and selectivity, with low surface defectivity. Tactras RLSA Poly features a multi-creature layout, providing flexibility in etch design. Up to eight different creatures can be incorporated into the etching process. The multi-creature layout enables the combining of various etching processes, allowing for the incorporation of both subtractive and additive etching processes. This is especially useful when complex shapes need to be etched into the substrate. The RLSA Poly also features precise monitoring of parameters, such as cell temperature, pressure levels, and gas flow, contributing to its accuracy and repeatability. The etcher is also equipped with a real-time monitoring system that enables the monitoring of mobile on-sample data, such as potential and distance, which helps in controlling etch uniformity. TEL / TOKYO ELECTRON Tactras RLSA Poly is an extremely versatile etcher, making it suitable for a wide range of applications. It suits materials such as SiO2, SiN, Si3N4, photoresist as well as polysilicon, poly-SiGe, and SiGe layers from GaAs substrates, that are used in semiconductor processes. The combination of high precision, uniformity, and versatility offered by the RLSA Poly makes it one of the best etchers available in the market today.