Used TEL / TOKYO ELECTRON Tactras SCCM #9290523 for sale

TEL / TOKYO ELECTRON Tactras SCCM (Super Chemical Control Machine) is an etcher/asher used to provide deep etching, fine patterning, and profile control for various metallization applications. It is a semiconductor process tool designed to provide superior substrate level planarization with minimal damage to the substrate. TEL Tactras SCCM has a compact design that offers maximum process capability, and improved control management capabilities. It has an intuitive user interface for easy operation, offering enhanced throughput with automatic processing and monitoring. The etcher/asher has three stages of automatic planarization, which includes a wet etching stage, a buffing stage, and a substrate planarization stage. TOKYO ELECTRON Tactras SCCM also offers a 'double-etch' feature to control etching depths as well as profile types with its advanced oil strate. Tactras SCCM is equipped with an advanced control system, which incorporates functions such as automatic etching, depletion, and sputtering from a single control module. This control module ensures synchronous operation of the etcher/asher, and can be used to improve the accuracy and consistency of the etching process. TEL / TOKYO ELECTRON Tactras SCCM is also equipped with a touch-screen control unit for greater ease of use, and can be connected to an array of systems for monitoring and control. It also offers a remote monitoring function, allowing the device to be monitored and controlled from a remote location. TEL Tactras SCCM etcher/asher also has various sputtering capabilities, including thin film, chemical-type sputtering, oxide-type sputtering, and reverse-ion extraction. The built-in electron beam evaporator allows for rapid, efficient, and uniform thin film deposition. Furthermore, the tactile sensorex and manipulator allow for precise control of position and speed of the substrate. TOKYO ELECTRON Tactras SCCM is an all-in-one etcher/asher, ideal for high-capacity production and process optimization. It offers precision etching/sputtering/depletion operations, as well as a full range of automation features. The efficient and user-friendly design ensures improved productivity with outstanding results.