Used TEL / TOKYO ELECTRON Tactras Vesta NV3 #293615961 for sale

TEL / TOKYO ELECTRON Tactras Vesta NV3
ID: 293615961
Vintage: 2010
Polysilicon etcher 2010 vintage.
TEL / TOKYO ELECTRON Tactras Vesta NV3 is an etcher/ asher designed to offer superior accuracy, process control, and user-friendly operation. It is a full equipment etcher and can be used to process various films and substrates such as silicon and metal films. The etcher is equipped with the latest process control technologies, such as ION source control, stage positioning accuracy, and automated programmer tool. It is designed to provide high repeatability and throughput, while delivering superior accuracy and uniformity of the etched material. TEL Tactras Vesta NV3 has an effective technology to provide automated parameter adjustments and control. Its ION source control system allows for precise control of the etching process, from one to fifty arc seconds resolution. The ION beam is modulated to target the desired area for etching, with little to no scarring on the material being processed. The ION beam also gives users the flexibility to adjust the level of etchant and rate of etching. TOKYO ELECTRON Tactras Vesta NV3 also has a stage area that is accurate up to 5-10 nanometers, ensuring accurate etch pattern alignment. Additionally, auto blanker control provides users with an option to lock the stage positioning in place and prevents surface damage from unnecessary stage movement. This feature is beneficial for those looking for a way to precisely control the etching operation. Tactras Vesta NV3 is also equipped with an intuitive programmable unit that allows for customizing and programming the etch operation to meet specific customer needs. The programming feature allows for automatic procedure control as well as other operation settings for more efficient etching results. This feature is especially important for large-scale etching projects that require precise control of etching material, such as semiconductors. To maintain quality and consistency, TEL / TOKYO ELECTRON Tactras Vesta NV3 is made of highly durable stainless steel and is designed with a built-in high capability of machine protection, ensuring the highest protection when working with high voltage and temperature applications. TEL Tactras Vesta NV3 has been designed to ensure quality results with minimal maintenance. In conclusion, TOKYO ELECTRON Tactras Vesta NV3 is a full machine etcher and asher designed to provide superior accuracy, process control, and user-friendly operation. It is an ideal tool for etching and ashing operations and is ideal for both large-scale and small-scale projects. With automatic parameter adjustments and programmable features, users are guaranteed to achieve their desired etching accuracy at a fast throughput.
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