Used TEL / TOKYO ELECTRON Tactras Vesta NV3 #293634269 for sale
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ID: 293634269
Wafer Size: 12"
Polysilicon etcher, 12"
(2) AC Distribution boxes
Loader module
(3) Load ports
Vaccum transfer module:
Transfer module
(2) Loadlock modules
(4) Process modules:
(3) HF RF Power supplies
(4) Gas boxes
(3) RF Generators
(3) TMP Controllers.
TEL / TOKYO ELECTRON Tactras Vesta NV3 is a state-of-the-art etcher/asher designed for pattern transfer and material removal in various microstructures. It is an efficient tool for advanced semiconductor processing and integrated circuit production. It has a large process chamber with a working area of approximately 300 mm and is capable of delivering high etching selectivity and excellent uniformity across the entire process area without any significant degradation in fabrication quality. TEL Tactras Vesta NV3 sets industry-leading standards for precision etching and ashing thanks to its high-performance plasma source and gas delivery system. Its enhanced performance is achieved by an electrostatic confinement system that controls the composition and ionization of reactive gases to allow an optimal etch rate and keep particles in suspension. It also has a unique source design with a series of turns for increasing ionization power and improving etching selectivity. In addition to its performance, TOKYO ELECTRON Tactras Vesta NV3 sets itself apart from the competition with its innovative user-friendly features. Its ergonomic control panel provides easy and intuitive programming of etching and ashing process parameters. It has an intuitive graphical user interface that allows users to directly visualize the process status, allowing for easier process optimization. Additionally, its digital controller provides more precise control and more reliable process operation. In terms of cost-efficiency, Tactras Vesta NV3 is a very affordable etcher/asher. It also has a low cost of ownership thanks to its high reliability and quick maintenance. This is further aided by its low power consumption during operation and its efficient communication link with other systems, allowing users to quickly retrieve up-to-date information regarding the process. Overall, TEL / TOKYO ELECTRON Tactras Vesta NV3 is an excellent choice for advanced semiconductor processing and integrated circuit production due to its combination of performance, user-friendliness and low cost. With its excellent etching, ashing, and uniformity across the entire working area, it is sure to satisfy the most demanding needs of the industry.
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