Used TEL / TOKYO ELECTRON Tactras Vigus-0 #9284628 for sale

TEL / TOKYO ELECTRON Tactras Vigus-0 is an advanced etching machine designed to etch patterns on semi-conductor substrates. The etcher is suitable for a wide range of applications, including high-precision circuitry for Airwrap™ air-sparing process, an innovative technology that helps improve etching quality and yield. TEL Tactras Vigus-0 is a high-end etcher with a 9-cell design, allowing multiple etching processes to be executed simultaneously. The machine is equipped with advanced hardware and involves the use of high-purity CoF2 etching gas. It has a load lock chamber, a wafer expansion chamber and a chemical vapor deposition source. The etch chamber can accommodate up to 30 wafers at one time. The etcher also features two plasma sources and three wafer heating stages, which enable support for a wide range of etching techniques. TOKYO ELECTRON Tactras Vigus-0 is equipped with a high-precision stage control and high-speed machining capability, which can improve the etching cycle time. It is also equipped with a real-time monitoring equipment to detect early signs of etch variation. The system allows for precise adjustments during etching processes, which can help reduce etching time and improve overall etching accuracy. The etcher features an advanced gas control unit, which helps ensure a steady flow of etching gas, while minimizing the risk of impurities entering the process. It is also equipped with a variety of plasma sources and etching gases, which allow for the optimization of etch profile, repeatability and selectivity. Further, the machine incorporates a number of safety and maintenance features, including high-precision leak detection, safety interlock, and power monitoring machine, which protect the etcher and its users. Tactras Vigus-0 is an advanced etcher suitable for a variety of complex etching processes in the semiconductor industry. The etcher is designed to deliver superior etching quality, precision and repeatability, while adhering to stringent safety and reliability standards. The etcher is highly configurable and scalable, and can accommodate a wide range of etching techniques with a high success rate.