Used TEL / TOKYO ELECTRON Tactras Vigus LK3+ #293649539 for sale

TEL / TOKYO ELECTRON Tactras Vigus LK3+ is an advanced etcher/asher designed for a wide range of semiconductor wafer processing applications. This sophisticated etcher features a multi-directional recirculating heated processing chamber, allowing multiple wafers to be processed in a single process step. In comparison to competing etching systems, theTactras Vigus LK3+ provides up to 30% improved etch rate and dimensional control. TEL Tactras Vigus LK3+ is constructed with a high-end automation equipment, enabling enhanced processtime accuracy and reproducibility. The tool also features a robust auto-cleaning system, allowing operators to reduce the total amount of manual cleaning and improve unit reliability. This machine is capable of automatic sensor calibration and a range of process monitoring, giving users greater process control. The user-friendly Graphical User Interface (GUI) of TOKYO ELECTRON Tactras Vigus LK3+ simplifies the etching process by providing easy to understand graphical displays and process parameters. This GUI allows the user to easily set process conditions, etch recipes, and troubleshoot in real-time. Additionally, with its data collection mode, users are able to access and store pertinent data, allowing for better process management. Tactras Vigus LK3+ provides spectrum flexibility, allowing users to customize the etching rate and process parameters for different substrate materials. Due to the multi-directional recirculating heated processing chamber, wafers are exposed to equal pressure and temperature throughout the etching process. This results in improved edge uniformity as well as decreased stress levels, especially during the etching of low-k substrates. Additionally, the low particle generation of the tool ensures exceptional wafer quality. TEL / TOKYO ELECTRON Tactras Vigus LK3+ is an ideal choice for those looking for a reliable and consistent etching asset. This robust machine includes a range of innovative features, ranging from improved etch rate and dimensional control, sophisticated automation, process monitoring capabilities, spectrum flexibility, and low particle generation. Whether you are a small IC design company or a large-scale manufacturer, TEL Tactras Vigus LK3+ is the perfect solution for your semiconductor wafer processing needs.