Used TEL / TOKYO ELECTRON Tactras Vigus LK3+ #293649540 for sale

TEL / TOKYO ELECTRON Tactras Vigus LK3+ is a state-of-the-art etcher/asher designed to provide advanced precision and quality for a variety of processes. This etcher/asher features an Under Bump Metallization (UBM) process, which significantly decreases the risk of inaccurately formed bumps caused by patterning errors or other issues. This process utilizes a PECVD process which deposits an UBM film on the metallic bumps, allowing for accurate and uniform placement of the bumps. TEL Tactras Vigus LK3+ also provides an advanced atmospheric pressure plasma treatment equipment, allowing for efficient surface activation. This process provides improved wettability of the substrate improving adhesion of the thin metal films to the wafer substrate. The system also provides a precise deposition rate, with metal precision of +/- 0.1nm and pitch control of 30nm ensuring precise metal deposition. TOKYO ELECTRON Tactras Vigus LK3+ has an environmental-friendly design, featuring low emission of particulates and a low pressure etcher unit which creates less hazardous exhausts. This machine is also fitted with an automatic multi parameter recorder which allows users to record a variety of signals and parameters during the etching or ashing process. Tactras Vigus LK3+ is equipped with various advanced safety management systems, including safety shutter, gas volume monitors, ground fault interrupters, and vacuum breakers. This tool provides reliable protection against accidents and machine breakdowns. This machine also includes a touch panel based control asset and laser resist edge profiling model which aid in controlling the etching process with precision. Overall, TEL / TOKYO ELECTRON Tactras Vigus LK3+ is an extremely advanced and reliable etcher/asher which offers superior accuracy and quality without sacrificing safety. Its advanced UBM process and precise deposition rate enable precise formation of metallic bumps, while its comprehensive safety management systems ensure reliable protection against accidents and machine breakdowns.