Used TEL / TOKYO ELECTRON Tactras Vigus LK3 #9312750 for sale
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ID: 9312750
Wafer Size: 12"
Vintage: 2017
Oxide etcher, 12"
Loader module 2.0
(3) Nitrogen purged load ports
(2) Chambers
(2) ATCC MP,120°
(16) Gas lines
(4) ATS 60 SE Chillers
(2) TEL / TOKYO ELECTRON Power racks
(2) EBARA ESV 300 Pumps
Advanced purge station
VTM / LLM Pump
Carrier ID reader for load ports
S-RDC
Syncronized pulse
FC2 Chamber
Large turbo pump (Non-heated)
C5K Endpoint detection system
Fast Flow Measurement System (FFMS)
SMIF
Handler
Gas:
Line / Gas
1 / H2
2, 13 / C4F8
3 / NF3
4 / CH4
5 / CH2F2
6 / CHF3
7, 16 / CF4
8, 14 / N2
9, 15 / O2
10 / CO
11 / CO2
12 / Ar
CE Marked
Does not include chillers
2017 vintage.
TEL / TOKYO ELECTRON Tactras Vigus LK3 is an etcher/asher used in the semiconductor manufacturing process. It is a single-chamber equipment that has been designed for batch processing applications in wafer fabrication. TEL Tactras Vigus LK3 is a fully automated etcher that can process up to 150 wafers in a single run. It is equipped with two independent sources of dilute hydrofluoric acid (DHF) to provide precise control over the etch depth of the desired wafer surfaces. TOKYO ELECTRON Tactras Vigus LK3 has incorporated a unique wafer holder design in its etcher chamber to provide maximum wafer loading stability and uniform processing time across all wafers. It utilizes a dedicated conveyor system and processing chamber to improve etch accuracy and reliability. The unit is capable of high-accuracy control using an advanced process controller and highly sophisticated software. The LK3 is compatible with various types of wafers such as silicon, aluminum, copper, and other materials. Additionally, the machine is capable of supporting multiple etching recipes and thus allows for quick changeovers and process optimization. Tactras Vigus LK3 is designed with a robust mechanical construction to ensure its longevity and dependability through many years of use. The durable housing is corrosion-resistant and was designed to withstand exposure to solvents and chemical cleaning agents. The tool is also equipped with an intuitive, user-friendly touchscreen interface that allows operators to view and adjust etch parameters quickly and easily. Additionally, the advanced user interface also offers robust service and maintenance features with remote diagnostics and real-time data logging capabilities. This asset is designed with safety in mind and offers multiple levels of protection for operator safety. TEL / TOKYO ELECTRON Tactras Vigus LK3 etcher is designed to meet all international safety standards, including NFPA 79 and CENELEC EN 60079-11. It also offers a range of safety features, such as a separate interlock model, emergency stop button, and noise limiters. TEL Tactras Vigus LK3 can be used by technicians to precisely and accurately etch various types of wafers. It is ideal for use in many semiconductor-related applications.
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