Used TEL / TOKYO ELECTRON Tactras Vigus RK3 #293649553 for sale

TEL / TOKYO ELECTRON Tactras Vigus RK3 is an etcher/asher designed for processing of advanced materials at the 115nm (0.1 μm) level. Its chemical-free, plasma-based etching technology allows for the fabrication of various structures, including trenches, contact holes or via holes, in the ultra-fine materials. This advanced etching technology has improved the performance of etching processes in the semiconductor industry. TEL Tactras Vigus RK3 etcher/asher features a high-accuracy, high-resolution Active Process Compensation (APC) system for process control. This feature allows for stable, highly repeatable etching processes. Furthermore, the processing speed is highly efficient due to the built-in active cooling system. The process chamber is designed with separate areas for plasma processing and material loading, and is capable of various etching processes. In addition, TOKYO ELECTRON Tactras Vigus RK3 comes with an expanded recipe database and feature set. This etcher/asher allows for the selection of optimal etching parameters with the option of creating customized etching recipes. Furthermore, the process condition database allows for saving, analyzing and displaying real-time process results, giving engineers powerful tools to optimize and control their processes. Tactras Vigus RK3 etcher/asher is an ideal solution for the high-resolution etching of materials at the nanoscale level, providing significant cost-efficiency and performance benefits. It is capable of delivering exceptional quality even in the most demanding etching applications, ensuring manufacturers of semiconductor devices get high-yield, defect-free products.