Used TEL / TOKYO ELECTRON Tactras Vigus RK4 #293649557 for sale

TEL / TOKYO ELECTRON Tactras Vigus RK4
ID: 293649557
Etcher Upgraded to RK5 OX.
TEL / TOKYO ELECTRON Tactras Vigus RK4 is a widely used etcher/asher available on the market, designed to provide the highest level of precision with advanced features. This equipment has a full suite of features that make it an ideal choice for both etching and ashing processes. The first unique feature of TEL Tactras Vigus RK4 is the gas delivery system, which is capable of providing a carrier gas and up to two gas mixtures simultaneously, allowing for a wide range of processes. The gas delivery unit also offers a timed opening, allowing users to easily and accurately control the argon flow and reaction duration within the chamber. Additionally, the RK4 is capable of automatic temperature-controlled cycling, allowing for the precise management of process temperatures. TOKYO ELECTRON Tactras Vigus RK4 is also equipped with a vacuum chamber containing two rotating platen assemblies which remove and carry the product for etching and processing. These assemblies are designed to accept product up to 4 inches in diameter, and facilitate rapid loading and unloading of the product in the process chamber. The automatic pressure control machine on Tactras Vigus RK4 is also an impressive feature, allowing for split-second pressure management and control during the etching or ashing process. This control tool allows users to adjust and calibrate the chamber pressure in real-time, ensuring the most accurate and consistent results possible. To make the most efficient use of its pressure control asset, TEL / TOKYO ELECTRON Tactras Vigus RK4 is equipped with a five-point pressure measurement model. TEL Tactras Vigus RK4 is designed for maximum precision and accuracy in order to minimize the risk of material damage or undersaturation during the etching or ashing process. The equipment offers a regular heating/cooling system which can accurately monitor temperatures and ambient conditions for improved process stability. Furthermore, TOKYO ELECTRON Tactras Vigus RK4 is equipped with an auto-stabilization unit, which helps reduce process fluctuations for optimal results. In summary, Tactras Vigus RK4 is designed to provide the highest level of precision in the etching and ashing process. Its suite of features, such as its gas delivery machine, autostabilization tool, and five-point pressure measurement asset, make the RK4 an ideal choice for labs looking to produce extremely accurate and consistent results in their etching and ashing processes.
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