Used TEL / TOKYO ELECTRON Tactras Vigus RK4 #293649558 for sale

TEL / TOKYO ELECTRON Tactras Vigus RK4 is an Etcher/Asher designed to process liquid and vacuum etching and ashing applications. It is a high-performance etching and ashing equipment designed to deliver process repeatability, excellent imaging performance, and high throughput. It is suitable for a wide range of applications, including multi-layer semiconductor processing. TEL Tactras Vigus RK4 utilizes a three-chamber design, and is capable of multiple etch/ash operations at the same time. The main etch/ash chamber is a large and isolated enclosed environment for minimal contamination. The chamber capacity is a maximum of 1080 liters and has a pressure range between 75 and 150 Torr. An independent dry process chamber is also included for anhydrous etch processes such as CF4 etch and SFE etch. TOKYO ELECTRON Tactras Vigus RK4 includes multiple sources for the process gases, which include hydrogen fluoride (HF), chlorine trifluoride (CF4) and SF6 to achieve high rates of etching selectivity and lower residue. A cold wall type electrostatic chuck (ESC) is included to ensure compatibility with advanced devices. The power system is independent and has a wide power range of 0.05kW to 50kW. It also has high reliability, with an RF antenna power chain unit and an embedded process monitoring machine. Tactras Vigus RK4 has several different processes that can be selected, including etched deep reactive etching (DRIE), isotropic etching, anisotropic etching, ashing and more. The Etcher/Asher also has versatile temperature control with a maximum temperature range of 500°C giving the operator the ability to customize each particular process. TEL / TOKYO ELECTRON Tactras Vigus RK4 supports multiple loading and unloading exchange mechanisms, such as a shuttle robot or a cassette-to-cassette tool. It is also equipped with a wet cleaning asset for a smooth surface finish, and has an IPPC protection level of 5. The entire model is made with fast operation, allowing for an excellent chemical mechanical polishing process and a fast cycle time for various etch/ash recipes.