Used TEL / TOKYO ELECTRON Tactras Vigus RK5 #293802353 for sale

TEL / TOKYO ELECTRON Tactras Vigus RK5 is an etcher / asher that is specifically designed for highly accurate etching of multi-layer patterns in a variety of materials, including silicon, metals, and ceramics. The Vigus RK5 is equipped with a high-speed data processor and memory functions and offer advanced layer control, and is capable of performing multiple mask layer etching and re-etching operations. The Vigus RK5 offers excellent process capability for etching very thin films. The equipment's closed-loop system and feed-forward feature provides excellent temperature control and consistently high etching precision. Additionally, it features a finely-tuned plasma unit that ensures uniform etching of films with complex geometries. The Vigus RK5 also offers multiple gas jet functions, enabling processing without residues and minimizing the amount of gases used, leading to a more efficient etching process. The Vigus RK5 etcher / asher is also equipped with safety features such as built-in interlocks and multiple dedicated gas sensors, which allow for safe operation of the equipment. It also has a robust, fully modular construction, which ensures maximum longevity and reliable process quality. The machine is also equipped with a long-life plasma power supply that provides for efficient heat dissipation and high productivity. The Vigus RK5 provides excellent performance and cost-efficiency for etching process solutions. Its intuitive interface, user-friendly features, and powerful functions make it very easy to operate and maintain. Additionally, it best employs the use of state-of-the-art technologies that enable processing of challenging materials and structures. Furthermore, the Vigus RK5 offers low disturbance noise, which allows for its easy integration in any modern processing environment. Overall, TEL Tactras Vigus RK5 etcher / asher is an ideal selection for the etching of complex structures in a wide range of materials. Its advanced etching capabilities, safety features, user-friendly interface, robust construction, and long-life plasma power supply allow for a high-precision, efficient, and cost-effective etching process.