Used TEL / TOKYO ELECTRON Tactras Vigus #293818724 for sale
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TEL / TOKYO ELECTRON Tactras Vigus is an advanced etcher/asher that is specifically designed for the fabrication of integrated circuit (IC) and flat panel display (FPD) substrates. It is a high-throughput platform that incorporates state-of-the-art process control and aggressive cycle times to deliver superior yields. TEL Tactras Vigus was designed to meet a wide variety of customer requirements with its robust feature set. TOKYO ELECTRON Tactras Vigus etcher/asher allows for automation and provides flexibility for a wide range of IC and FPD processing processes. It has an open platform architecture with an intuitive graphical user interface (GUI) which enables fast setup and operation. Through the use of advanced process control technology, Tactras Vigus can deliver reliable and repeatable etching processes first time, every time. TEL / TOKYO ELECTRON Tactras Vigus's process flexibility allows users to etch everything from small substrates to large panels while maintaining the best results. TEL Tactras Vigus features a compact footprint which maximizes available working space. It utilizes multi-beam laser-assisted ablation for greater accuracy and better edge definition. Its high substrate throughput allows for greater productivity. The automatic loading and unloading of wafers is further facilitated by the integrated Compact Load lock module. TOKYO ELECTRON Tactras Vigus can accommodate processes such as aluminum anodization, EDM, ablation and reactive ion etch. It is designed for harsh environment applications such as automotive, communications, microwave electronics and medical device industries where robust etching solutions are required. The etching modules can be positioned in a work bench layout to provide flexible real-time etching patterns. The advanced process control programs in Tactras Vigus ensure repeatable, accurate etching every time. The touchscreen GUI, visible indicators and settings provide an intuitive user interface for the operator. This gives the user the ability to quickly adjust the parameter settings and fine-tune the etching process. The variety of available status settings allow the user to optimize the etching process for any substrate, and TEL / TOKYO ELECTRON Tactras Vigus also provides on-the-fly etching parameter adjustment to match changes in process conditions or substrates. TEL Tactras Vigus incorporates powerful process control technology to ensure a repeatable and accurate etching process. Features such as encrypted hard drives, automatic wafer identification, environmental monitoring, and monitoring over temperature, pressure and voltage make TOKYO ELECTRON Tactras Vigus the perfect choice for your etching needs. Its compact footprint, flexibility and reliability make Tactras Vigus the top choice for advanced etching of IC and FPD substrates.
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