Used TEL / TOKYO ELECTRON Tactras Vigus #9252286 for sale

TEL / TOKYO ELECTRON Tactras Vigus is an etcher/ asher that provides superior etching performance and throughput in the semiconductor manufacturing process. TEL Tactras Vigus is designed with a unique dual-chamber electrochemical etching equipment (ECE) that provides precise and consistent wafer etching, with fast wafer processing time.This versatile etcher is ideal for processing a range of diverse and complex processes such as SiC, SiGe, III/V compounds, and Cu. This etcher is designed with a unique dual chamber system. The ECE unit allows for different etching recipes and chamber temperatures, which ensures optimal etching results. In addition, the machine also allows for process optimization and process control through its automated processes. TOKYO ELECTRON Tactras Vigus provides very precise and consistent etching results. This etcher is capable of etching up to 25 mils (635 microns) per hour which is one of the fastest rates available in the market today. In addition, the ECE tool provides excellent etching uniformity throughout the wafer with even the most challenging of etch profiles. This etcher is user-friendly, highly reliable, and offers a wide range of features such as integrated safety and environmental control. Other features include real-time monitoring and analysis tools, and a built-in autoclaving function for cleaning and decontamination. The etch chamber also offers an independent loading and unloading mechanism ensuring the utmost safety and reliability for all processes. The control asset of Tactras Vigus is designed to be intuitive, allowing quick and easy setup and operation. TEL / TOKYO ELECTRON Tactras Vigus is an excellent choice for any semiconductor application in need of a precise and reliable etching process. Its innovative dual-chamber model provides the utmost efficiency and flexibility, tailored to meet a wide range of etching requirements. This etcher offers a high throughput rate and a reliable process control that will help you achieve your production goals.