Used TEL / TOKYO ELECTRON Tactras #293591387 for sale
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ID: 293591387
Vintage: 2010
Etcher
EFEM
TM
Power racks
AC Racks
(3) Chambers
Accessories
2010 vintage.
TEL / TOKYO ELECTRON Tactras is a highly advanced etcher / asher technology which is used in the semiconductor industry for a wide range of processes. As an etcher / asher, TEL Tactras equipment is extremely efficient, accurate, and reliable. TOKYO ELECTRON Tactras system works by using an inductively coupled plasma (ICP) source to create free electrons, which are then accelerated into a thin film layer. The ICP source and optical focusing lens are designed to provide a uniform plasma beam density over a wide area, allowing a high degree of control over the etch process. Tactras has a wide range of operational parameters and selectable parameters, such as pressure, power, and temperature. This allows for the fine-tuning of process variables and for optimal etch rate and process yield. Furthermore, TEL / TOKYO ELECTRON Tactras includes an interactive programmable touchscreen interface, allowing for easy operation and automation of the etcher / asher unit. TEL Tactras machine is equipped with advanced safety features such as an interlock tool and an RF protection shield. These features help to protect both personnel and equipment from the potentially damaging effects of ICP radiation. The asset is also fully adjustable and configurable to maximize throughput, minimize costs, and enhance process uniformity and reproducibility. TOKYO ELECTRON Tactras etcher / asher is suitable for advanced forms of micromachining, deposition, photomask, and etching processes. Additionally, Tactras model can be used in ultrafine, low-temperature, low-pressure etching processes, as well as high-temperature, high-pressure processes. This capability provides a wide range of applications in the precision semiconductor industry. In conclusion, TEL / TOKYO ELECTRON Tactras Etcher / Asher is a highly advanced etching equipment which provides efficient, reliable, and accurate etching and ashing processes. Featuring an array of safety features, adjustable parameters, and a modern touchscreen interface, TEL Tactras system is highly suitable for the precision semiconductor industry.
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