Used TEL / TOKYO ELECTRON Tactras #9286335 for sale
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ID: 9286335
Wafer Size: 12"
Vintage: 2009
Etcher
EFEM
TM
Power racks
AC Racks
(3) Chambers
Accessories
2009 vintage.
TEL / TOKYO ELECTRON Tactras is an etcher/asher equipment that offers reliable, stable, and high-precision processing of a variety of different materials. The system is fully automated with intelligent setup and process monitoring, so that everyone in the laboratory can benefit from its accurate performance. TEL Tactras is designed with advanced robotics to CAE debris, particles, and carry out efficient coating processes. It is equipped with automatic focus adjustment for highly accurate surface layer profiles, ensuring a superior etching finish even in difficult-to-reach areas. TOKYO ELECTRON Tactras also features a unique two-stage vacuum unit that allows for fast and efficient de-aeration of substrates, resulting in decreased processing times. The user experience is further enhanced with an easy-to-read LCD display providing real-time processing status information, including the remaining time until completion and a detailed list of recipes. Safety is enhanced through the inclusion of passcode locks and an emergency stop switch. The machine is ideal for use in a variety of laboratory settings, including materials laboratories and university research departments. Tactras is capable of processing copper, gold, and other precious metals and alloys. Etching is carried out using both sputter and thermal evaporation techniques, allowing for high uniformity and accuracy. The two-stage vacuum tool also enables superior processing of difficult-to-etch materials such as silicon. With a wide range of chamber capabilities, TEL / TOKYO ELECTRON Tactras can be customised for different applications. The asset's built-in gas model means that it is capable of using photomask developers to etch patterns onto substrates (e.g. MEMS device patterning). AR/VR etching is also possible, allowing for improved process accuracy and resolution across a range of materials with minimal cutting time. TEL Tactras is designed to be low-maintenance and features a range of self-diagnostic capabilities to help detect any errors quickly and accurately. Its modular design also allows users to easily expand the equipment if desired. TOKYO ELECTRON Tactras comes with a choice of software tools for both experienced users and those with no prior experience. As such, Tactras provides a powerful and user-friendly solution for a wide variety of etching and coating needs.
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