Used TEL / TOKYO ELECTRON Tactras #9397360 for sale

TEL / TOKYO ELECTRON Tactras is an etcher / asher designed to offer precision etching and stripping capabilities in the manufacturing of semiconductor products. It is a high-throughput, fully automated equipment with a reliable and robust design for heavy-duty manufacturing environments. The system is made up of two compartments. The first is the loadlock chamber, which is used to contain the reactor chamber, which is where the actual etching occurs. The loading mechanism facilitates quick, easy loading and unloading of substrates. The substrate is submerged in an etching solution, and then agitated and exposed to a gas mixture with a specific process pulse. The unit is able to etch large-scale substrates from wafer-type substrates up to samples 13 inches in size. The second chamber is the controller station, where the operator can input various process parameters for the etch process. The machine offers a full range of process parameters that can be adjusted to accommodate the specific product requirements. The parameters can be set to control the time, temperature, ratio of gases and solution, processing voltage and other parameters to achieve the desired results. TEL Tactras offers a high-level of digital control with a highly advanced tool integration. An Ethernet connection allows production monitoring and data collection, while a database asset provides an accurate record of data. The model can also interface with other etchers and ashers, streamlining the production process even further. The equipment is UL listed and complies with the RoHs Directive, providing the operator with an exemplary level of safety and reliability. TOKYO ELECTRON Tactras' automated system ensures that the manufacturing process is highly consistent, providing high-quality results for even the most complex of products. The unit offers superior precision etching / ashing capabilities and is designed to meet the stringent demands of modern day manufacturing.