Used TEL / TOKYO ELECTRON TE 5000 ATC #293823431 for sale

TEL / TOKYO ELECTRON TE 5000 ATC
ID: 293823431
Oxide etcher.
TEL / TOKYO ELECTRON TE 5000 ATC is an advanced etcher/asher designed for advanced etching processes for a range of semiconductor applications. The etching process involves using chemical etching to form a specified pattern, shape, or design on a surface. This is typically used in microelectronic fabrication processes such as photolithography to create a desired finished product. TEL TE 5000 ATC is designed for high-precision and high-throughput etching applications. It is equipped with precision control systems for the exact delivery of temperature, pressure, and gas systems to create the properly etched surfaces or structures. It also has a high-speed scanning equipment to accurately analyze andimplement etching processes in a variety of semiconductor devices. This etcher/asher is constructed of high-grade materials with multiple layers of safety to prevent against operation risks and error. The system is designed to be easily operated and user-friendly. It has an intuitive operation panel with access to a wide array of data and control settings. It features a full-scale heating chamber made of stainless steel for thermal control of etching recipes to guarantee repeatability of etching processes. The quality of the etching can be monitored by the unit's quick alignment feedback camera, which provides instantaneous imaging of various criteria such as pattern density and depth. TOKYO ELECTRON TE 5000ATC also utilizes RF-spark discharge technology for a host of cleaning and etching processes. It is built to handle stresses of wet etching and is capable of handling both etching of silicon and non-silicon materials. The etcher/asher is designed with an advanced gas delivery machine, allowing for a seamless combination of clean, dry, and inert gases for plasma-enhanced etching processes. The tool also uses an advanced substrate staging asset for efficient use of space and to reduce operator fatigue. TOKYO ELECTRON TE 5000 ATC is designed to be used in a variety of high-performance semiconductor fabrication environments. It has a flexible architecture allowing for implementation into production lines with minimal re-configuration. It operates with high process repeatability, while providing excellent precision etching results.
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