Used TEL / TOKYO ELECTRON TE 5000 ATC #9142630 for sale

TEL / TOKYO ELECTRON TE 5000 ATC is an advanced etcher / asher equipment for high-volume processing of materials. It uses a single-wafer etching chamber to process substrates up to a maximum of 200 mm in diameter at a rate of up to 50 wafers per hour. The system is composed of a multi-bucket load lock station, a high-stability etching chamber, a low-pressure plasma etch source, a closed-loop abatement unit, and an exhaust machine consisting of a diaphragm pump and filter. The etch chamber has a uniform temperature and pressure control, making it easier and does not require complex reactive gas control. TEL TE 5000 ATC has an integrated computer tool with advanced monitoring capability. It is designed for use with either HPLC grade CF4 or NF3 gases. The asset can include several process steps such as plasma etching, reactive ion etching, and passivation in one cycle. The process parameters are recorded with every process run, and the result can be compared with the target recipe. The model is designed for high-precision pattern etching and allows for precise control of the etch parameters, such as selectivity, etch rate, and accuracy. TOKYO ELECTRON TE 5000 ATC equipment can handle a variety of substrates, from metals to silicon wafers and insulating films. It also has an automated loading/transferring system for wafers and cassettes. It has an automated pump control for precise etch chamber pressure control. The unit has a high-throughput process capability with a high level of repeatability for product consistency. It has high-resolution visualization capability with a a built-in camera. The machine is designed for reliable operation with minimal downtime. It has a built-in relievable circuit and process monitoring, and a built-in safety interlock tool. The asset is designed for easy maintenance and cleaning, and can be connected with a personal computer for data logging and recordkeeping. The model has been designed to meet all applicable safety and environmental regulations. TE 5000 ATC is a reliable and advanced etcher / asher equipment for high-volume processing. It is designed for precise control of etch processes, and also has an integrated computer system with monitoring capability. It is a safe and reliable unit with easy maintenance. It is suitable for a range of substrates and can provide consistent and reliable results.