Used TEL / TOKYO ELECTRON TE 5000 #293747707 for sale

TEL / TOKYO ELECTRON TE 5000 is an advanced etching/ashing equipment offering best-in-class performance and productivity. This semi-automatic system is designed for cost-efficient and reliable processing of a variety of substrates, including metals, silicon-on-insulator (SOI) substrates, and other materials. By using powerful SCS (Substrate Conditioning Unit) technology, its motion control machine provides superior substrate management and greatly reduces the time required for surface preparation prior to etching. This high-end etching platform can also be used to process smaller-sized substrates. TEL TE5000 was designed to produce high-quality etching results for complex, fine-pitched features on various substrates. It features a multi-axis high-speed X, Y, and Z scanning stage, which allows for faster and more accurate substrate movement. The tool also includes a high-precision laser interferometer, which effectively compensates for thermal expansion and other disturbances. Its closed-loop feedback ensures high etch consistency across large substrate sizes, enabling superior repeatability and reliability of the etching process. The asset also includes an integrated advanced atmospheric plasma source, which optimizes and controls the plasma balance, pressure and temperature of the etching process. The model has an efficient resist removal equipment, providing enhanced soft-bake process for reliable, uniform resist removal. The etching speed of TOKYO ELECTRON TE-5000 is further increased by its advanced RF-ETP (RF Enhanced-Throughput Process) technology. This innovative process reduces the time required for etching, while increasing etching accuracy. The efficient operation and easy maintenance of TOKYO ELECTRON TE5000 make it suitable for manual and automated system integration in harsh production environments. This low-cost and high-performance etching unit provides superior cost savings and unparalleled performance. Because of its superior etching capability, TEL TE 5000 is recommended for today's most technically demanding applications.