Used TEL / TOKYO ELECTRON TE 5000 #293758430 for sale
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TEL / TOKYO ELECTRON TE 5000 is an etcher/asher used for a variety of processes. It is a multi-station tool that can be used for photoresist removal, metal etching and film deposition. It is designed for multiple applications and is capable of handling both low and high volume production needs. TEL TE5000 is equipped with a digital control board, which provides users with precise control and accurate results. The tool is also equipped with an on-board diagnostic equipment, making maintenance and troubleshooting easier. TOKYO ELECTRON TE-5000 features a robotic XYZ motion stage, with a load capacity of up to 200lbs, an adjustable height and a motion range of up to 45-degrees in the X, Y and Z axes. The system also features a wide range of peripherals, such as a programmable controller, multiple heads, vision systems, robot arms, and gas mixing panels. This allows users to customize the unit to fit their unique requirements. TEL / TOKYO ELECTRON TE5000 also features a durable stainless steel construction and is designed to withstand a variety of user conditions, including a variable temperature range between -30C and +60C, a variable relative humidity range between 20-90%, and a variable pressure range of 5-10.3 bar. The machine can accommodate wafers up to 8" (200mm) in diameter and is designed to be compatible with a variety of reaction chambers and tool configurations. TEL / TOKYO ELECTRON TE-5000 also provides an adjustable temperature range of up to +160C, adjustable pressurized gas channels, and high temperature safety systems that protect delicate process materials from heat damage. The tool also offers an integrated vision tool that allows users to inspect workpiece surface features, enabling them to quickly adjust the etching or deposition process to ensure quality results. In addition to TEL TE-5000's capabilities, it is also compatible with a wide array of semi-automatic and automatic loading systems, making it an ideal solution for both low and high volume production. The asset is compatible with a number of materials, including photoresist, silicon, sapphire, and other materials, making it a versatile tool for many applications. Overall, TE 5000 is a reliable and efficient etcher/asher that is designed to handle a variety of processes. It is a multi-station tool with a wide range of capabilities and peripherals, allowing users to customize the model to meet their specific needs. TOKYO ELECTRON TE5000 provides precision process control, a wide temperature range, high reliability and production efficiency, making it a great choice for etching and deposition processes.
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