Used TEL / TOKYO ELECTRON TE 5000 #293820984 for sale

TEL / TOKYO ELECTRON TE 5000 is a high-precision wafer etcher developed by TEL. This etcher is suitable for a wide range of applications, including semiconductor processing, MEMS, display processing, and photonics. TEL TE5000 features advanced plasma etching technology combined with advanced photo-assisted etching. This etcher provides extremely precise etching control, enables high aspect ratio, and provides excellent uniformity and throughput for various etch processes. The etcher has a sophisticated chamber design, enabling up to 5 levels of etch processes. TOKYO ELECTRON TE-5000 is engineered to provide high throughput and high process accuracy. The etcher is designed to accommodate process chamber sizes up to 200 mm x 200 mm, and wafer sizes up to 300 mm. The wafer loading and unloading process can also be automatic, allowing for efficient batch processing. TE-5000 is equipped with an advanced, user-friendly software interface. The interface makes it easy to set up and control etch processes. The software also enables users to monitor and control various parameters such as gas flow rate, pressure, and gas mix ratios. It also allows users to analyze and optimize etch processes with the data collected during the process. TEL TE 5000 is designed with an optimized chamber structure to provide superior etch uniformity and process repeatability. It contains both RF and DC sources, providing users with powerful control of process variables. Other features of this etcher include the ability to perform rapid temperature control, an optional wafer mapping capability, and a fast robot arm design. Overall, TEL / TOKYO ELECTRON TE-5000 is a highly advanced, reliable, and user-friendly wafer etcher. This etcher is a great choice for a variety of semiconductor processing, MEMS, display processing, and photonics applications. Through its sophisticated hardware and software, TEL TE-5000 delivers superior etch results with superior repeatability and precision.