Used TEL / TOKYO ELECTRON TE 5000 #9396121 for sale

TEL / TOKYO ELECTRON TE 5000 is a high performance, high accuracy etcher/asher designed primarily for semiconductor processing. As such, it is an ideal tool for the in-house fabrication of integrated circuit devices. TEL TE5000 is a single-station, large-area etcher/asher that features an advanced controller with full process-recipe capabilities. It is capable of accurately patterning a wide variety of photoresists, including those designed for submicron IC production. Digital universal controls permit quick warm-up and optimized plasma processing functions. TOKYO ELECTRON TE-5000 offers uniform conformal etching across a wide variety of substrates, including quartz wafers and various oxide films. The etch rate can be accurately programmed to fulfill device performance requirements. Silicon etches less than 10 percent of its thickness in less than one minute. TEL / TOKYO ELECTRON TE-5000 also includes a diagnostic port which permits remote monitoring and analysis of the etch/ash process. This port allows an operator to monitor etch uniformity and to make adjustments as needed. TOKYO ELECTRON TE 5000 is also compatible with a broad range of components for post etching/ashing applications. These include chemical bath tanks, nitrogen dryers, and plasma vapor deposition systems. During the ashing process, TEL / TOKYO ELECTRON TE5000 will remove contaminants from a sample's surface in an environmentally-friendly manner. In addition to its excellent etch/ash performance, TE-5000 is also very easy to operate. The range of configurable features allows users to easily tailor its process parameters to their requirements. TOKYO ELECTRON TE5000 does not require extensive training and is easy to integrate into existing fab processes. Overall, TEL TE-5000 is an advanced etcher/asher that offers superior accuracy, control, and performance. It is an ideal solution for anyone looking to do precision semiconductor etching/ashing in-house and achieve world-class device production results.