Used TEL / TOKYO ELECTRON TE 5000S ATC #9148389 for sale

TEL / TOKYO ELECTRON TE 5000S ATC
ID: 9148389
Plasma etcher.
TEL / TOKYO ELECTRON TE 5000S ATC is an advanced etching equipment for high-density low-cost etching processes. The system utilizes a unique design that utilizes an automated track control (ATC) for controlling the width and movement of the etch beam. The ATC provides high accuracy in the etch beam position and movement, resulting in improved etch quality. TEL TE 5000S ATC also includes a high-precision beam-positioning unit and a precision-controlled source of etch current to maintain uniform etch rates. TOKYO ELECTRON TE 5000S ATC is a dual-level machine that can etch through multiple layers of material with high accuracy and throughput. It is also suitable for etching onto a variety of substrates, such as SiO2, SiNx, and SiGe. The etch rate is adjustable with a wide range of etch capabilities, allowing the etcher to etch with high speed and accuracy. The tool also has low cost-of-ownership and can be used in the production of fine lines and structures. TE 5000S ATC utilizes an integrated ion source and ion chamber for controlling the etch rate. The asset also incorporates an advanced controller for controlling the etch profile. The model allows for quick setup and easy operator interface for controlling the process parameters, including voltage, current, beam direction, and etch rate. The ATC is powered by a stepper motor for accurate speed and position control. TEL / TOKYO ELECTRON TE 5000S ATC is capable of etching a wide range of materials including SiO2, SiNx, SiGe, GaN, and more. The equipment is designed to provide superior control of the etch process parameters including current, voltage, and etch rate, yielding high-quality etch results. The system can be used for etching through-holes, blind vias, and complex patterns as well as other advanced etching processes. TEL TE 5000S ATC has a high-tech stainless steel construction with a quartz window and high-temperature glass side walls, which provide excellent protection. The unit is designed to be easy to operate and has a user-friendly interface with a graphical display, making it easy to set up, monitor, and store process data. The machine is also equipped with a number of safety features, including emergency shut-down of the etching process in the event of an emergency. TOKYO ELECTRON TE 5000S ATC provides a robust, reliable, and efficient etching tool for high-density low-cost etching processes. The asset provides superior control of the etching process parameters, providing high quality results with high speed, accuracy, and repeatability. The model is ideal for the production of fine lines and structures, as well as for through-holes, blind vias, and complex patterns.
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