Used TEL / TOKYO ELECTRON TE 5000S #9226073 for sale

TEL / TOKYO ELECTRON TE 5000S
ID: 9226073
Wafer Size: 6"
Vintage: 1993
Etcher, 6" 1993 vintage.
TEL / TOKYO ELECTRON TE 5000S is an advanced etcher / asher, designed for high-end precision etching applications. This etcher/ asher is a versatile, high-performance device, designed to facilitate the high resolution lithographic etching of various substrates. It is capable of performing wet processes on wafers up to 8 inches in diameter, at temperatures up to 1000°C. TEL TE 5000S features an advanced top-side multi-beam scanner, and delivers precise edge-definition of etch patterns, a process that can be further enhanced with advanced edge-polishing techniques. TOKYO ELECTRON TE 5000 S offers a number of unique, proprietary features, with a range of imaging tools such as advanced optical imaging, high resolution scanning electron transmissometers, and electron beam lithography for pattern definition. TE 5000S also includes a number of automated process control measures, including the ability to monitor the chemical composition of gases and solutions used in the etching process, as well as the temperature and pressure levels inside the etcher. Furthermore, the device is fitted with a range of process measurement tools, including the use of atomic force microscopy, in order to ensure maximum accuracy when etching. In addition to these features, TE 5000 S also features various safety features to protect the device, its operators and its surroundings. These include an isolation chamber, low-flow emergency shut-off valve, and an array of safety sensors and alarms. Furthermore, the device has a robust, stainless steel housing, designed to ensure that it is not damaged or degraded in any way during the etching process. In summary, TEL / TOKYO ELECTRON TE 5000 S is a powerful, precise, and reliable etching / ashing device. It offers a number of sophisticated features to enable precise etching of various substrates, as well as advanced automated process control measures and safety features to ensure maximum safety and accuracy.
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