Used TEL / TOKYO ELECTRON TE 580LC #9091963 for sale

TEL / TOKYO ELECTRON TE 580LC
ID: 9091963
Wafer Size: 6
Vintage: 1998
Oxide etcher, 6" Chamber 1998 vintage.
TEL / TOKYO ELECTRON TE 580LC is an advanced etcher/asher designed for the production of both liquid crystal displays (LCDs) and thin-film transistor-liquid crystal displays (TFT-LCD). It is capable of etching and ashing with highly precise control over the shape, size, and thickness of etched and ashed layers. The 580LC features a large, open-frame design to allow for the installation of a variety of etching and ashing gases to produce high-quality LCDs and TFT-LCDs. It also features an automated configurable equipment, allowing users the ability to adjust settings such as etch rate and uniformity, as well as other control parameters related to the quality of the LCDs or TFT-LCDs. The 580LC employs a high-performance sputtering and etching technology, ideal for producing high-resolution LCDs and TFT-LCDs with low defect ratios. Its high-resolution imaging system provides enhanced control of the etch and ashing process, and is equipped with an automated optical unit to ensure precise adjustment of the etch and ashing resolution. Etch and ashing parameters are easily initiated from the LCDW software, allowing users to customize for their exact requirements. In addition, the 580LC boasts an advanced scanning capability which allows it to easily etch and ashing repetitive patterns with a high degree of accuracy. The 580LC's advanced pattern recognition capabilities reduce the time and cost associated with patterning projects. The 580LC's effective step-and-repeat operation ensures the consistent production of highly precise patterns, and provides fast and reliable production of high-resolution patterns. The etcher/asher also features advanced monitoring and diagnostic capabilities, allowing users to track etching performance and identify irregularities in production. The 580LC's built-in Auto-Origin machine permits automatic adjustment and fine-tune of etching and ashing parameters, allowing for the precise determination of optimal etch rates and ashing quality. As such, TEL TE 580LC is an advanced etcher/asher able to achieve superior quality and productivity in the production of LCDs and TFT-LCDs.
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