Used TEL / TOKYO ELECTRON TE 580LC #9091964 for sale

TEL / TOKYO ELECTRON TE 580LC is a high-precision, high-throughput etcher / asher designed for use in a variety of applications in the semiconductor and integrated circuit manufacturing industry. The equipment is based on a high-efficiency, self-contained system that integrates a plasma source, process chamber, vacuum pump, controller and software. This combination provides users with a high degree of accuracy and process control. TEL TE 580LC is capable of processing feature sizes down to 10 μm in linear etch/asher applications. The unit is equipped with a multi-slit linear array scanner to provide uniform exposure of the wafer surface and accurate etch/asher profile control. The chamber has an enhanced process chamber design that enables improved throughput and better process control. TOKYO ELECTRON TE 580LC features a wide range of process control features such as temperature feedback control for consistent etching/ashing, real time mass spectrometry monitoring, and precise pressure control. The advanced process control technologies ensure consistently high-quality results and increased process repeatability. TE 580LC also features a wide range of safety features, such as high-pressure safety valve, shutter lockout, and remote start. The machine has an integrated gas exhaust manifold that enables efficient and safe gas usage and helps to maintain a safe working environment. The tool also has a robust and redundant cooling asset with multiple fans and heat sink to keep operating temperature stable and to prevent overheating and maintain long-term model performance. TEL / TOKYO ELECTRON TE 580LC has a easy-to-use graphical user interface, and automated recipes and process set-ups are available for routine processes. The equipment is also easy to maintain, with regularly scheduled preventive maintenance that ensures proper operation. Overall, TEL TE 580LC is a reliable and powerful etcher/asher system that offers high accuracy and repeatability for a variety of etching/ashing applications. The unit is robustly constructed and easy to use, and can provide excellent performance and consistent results.