Used TEL / TOKYO ELECTRON TE 7400 #9198267 for sale
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TEL / TOKYO ELECTRON TE 7400 is an etcher / asher designed for the production of advanced semiconductors. It is capable of processing substrates up to 200mm in size, making it ideal for semiconductor production, wafer probing and packaging. The machine features an aqueous-based wet etch equipment, enabling etch rates of up to 100nm/min and select wafer temperatures of up to 100°C. It also offers multiple cavity configurations and advanced process monitoring capabilities, allowing for exact etch profiles with precision trouble-shooting. TEL TE 7400 boasts a highly precise automation system thanks to its ability to accurately control precise etch rates based on temperature and other parameters. The easy-to-use recipes also make the unit intuitive to operate and fast and accurate to set up. The machine is also capable of handling high volumes of ICs and substrates, meaning that it is suitable for production runs. The environment friendly design of TOKYO ELECTRON TE 7400 utilizes cooling water to purge any undesirable etchant vapour, and features a well-designed exhaust tool that allows for easy evacuation of volatile compounds. The enclosed design also limits exposure to dangerous etching chemicals. TE 7400 features an advanced image-based process monitor which enables real-time wafer imaging, allowing for precise profile control and process tuning. This monitor also allows for an in-depth analysis of the etching process, providing insight into critical process parameters. Automatic cleaning and over-etching operations can be activated to guarantee clean, consistent etching profiles over a wide range of substrates. TEL / TOKYO ELECTRON TE 7400 has the ability to accurately detect the etching rate which automatically adjusts the process parameters in order to maintain accuracy. Combined, these features mean that TEL TE 7400 is highly reliable etcher / asher, which guarantees efficient and precise production of advanced semiconductors.
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