Used TEL / TOKYO ELECTRON TE 7400 #9202961 for sale

TEL / TOKYO ELECTRON TE 7400
ID: 9202961
Oxide etcher.
TEL / TOKYO ELECTRON TE 7400 is a specialized etcher/asher for semiconductor wafer fabrication. It provides superior, reliable and repeatable performance in the etching and ashing processes. TEL TE 7400 features a patented Pyrolysis preconditioner equipment which can significantly reduce the levels of non-uniform etching and ashing. TOKYO ELECTRON TE 7400 is a programmable etcher and asher and features an easy to use graphical user interface (GUI) for the control of the etch and ash parameters. The GUI allows for manual control of process parameters, and can store up to 50 sets of individual recipes. TE 7400 also allows for automatic processes which can save downtime and reduce the time need for manual operations. The etcher is designed to handle a broad range of etching gases including O2, SF6, CF4 and CHF3. TEL / TOKYO ELECTRON TE 7400 features a reactant gas delivery system which is designed to ensure a uniform delivery of the etching gases to the wafers. The wafers are processed in two processing chambers, one for etching and one for asher. The etching and ashing times are adjustable with a range from 0-999 seconds. TEL TE 7400 also features a station for mounting a range of electrode designs, from the standard design to a customised design. The standard design can be used for etching operations while the customised design can be used for slit etching operations. TOKYO ELECTRON TE 7400 optics unit is designed to ensure uniform and precise electrode control during the etch and ash operations for superior performance. TE 7400 also features a Scan Electronics Mass Flow Controller (SEMFC) which helps to accurately control the process gas flow in both the etching and asher chambers. This feature ensures that the etching and ashing processes are precise and repeatable. It also helps to minimize the chances of voids or unintended etches or ashes on the wafers. Lastly, TEL / TOKYO ELECTRON TE 7400 comes with several safety features. There is an automatic door interlock to ensure safety when entering the etcher and an over-pressure switch to shut down the etcher when the pressure exceeds operating limits. The in-dwell monitoring feature continuously checks the temperature of the wafers during the etch and ash processes. This helps to ensure accurate temperatures for uniform etching and ashing. Overall, TEL TE 7400 is a specialized etcher and asher for semiconductor wafer fabrication which provides superior results and is easy to operate. With its patented preconditioner machine and programmable process control settings, TOKYO ELECTRON TE 7400 provides reliable and repeatable performance that is essential for many etching and ashing operations.
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