Used TEL / TOKYO ELECTRON TE 7500 #9198156 for sale

ID: 9198156
Oxide etcher, 6" Prcess: RIE(2).
TEL / TOKYO ELECTRON TE 7500 is a type of etcher and asher equipment designed to create chemical-mechanical polishing (CMP) processes used in a variety of industrial applications. This system offers precise chemical-mechanical material removal, sub-1 angstrom-level wafer polishing, and multiple chamber configurations for optimal process throughput. It is also compatible with a variety of experimental module configurations for use in advanced research and development. TEL TE 7500 features two process types, the 'ePolish' and the ' etch/Ash' mode. In the ePolish mode, isotropic and surface-segmented polishing is provided through the use of CMP technology, offering precise process control and superior wafer-polishing accuracy. For the etch/Ash mode, TOKYO ELECTRON TE 7500 features a modular, multi-chamber architecture which enables optimized processing for etch/ash recipes, with efficient wafer interface for substrate transfer accuracy. TE 7500 utilizes a digital brushless spindle motor design which allows for maximum process circuit efficiency, enabling users to achieve higher throughput rates. It also features Intelligent Oasis Control Software which monitors and adjusts the liquid environment for both standard wafer polishing and etching/ashing processes. This allows for the unit to automatically maintain process stability for increased reproducibility and quality control. TEL / TOKYO ELECTRON TE 7500 also features an in-situ Oxide/Metallization Deposition Machine which makes it possible to instantly prepare the wafers for polishing, etching or ashing. Moreover, TEL TE 7500 also features an intelligent recipe control software which providesfor real-time optimization of process parameters during the CMP process, utilizing a database of proven recipes stored in the in-situ Oxide/Metallization Deposition tool to ensure optimal cycle lengths and process quality. An open source recipe development tool is likewise available for testing and development of new processes. TOKYO ELECTRON TE 7500 is a powerful and reliable etcher and asher asset offering superior process accuracy and throughput. Its various features make it an ideal choice for many industrial applications, such as wafer-level packaging, advanced dielectric CMP or giant magnetoresistive device fabrication. This model is an ideal solution for controlling process costs, a critical component of successful business operations.
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