Used TEL / TOKYO ELECTRON TE 7500M #293600493 for sale

ID: 293600493
Vintage: 1994
Oxide etcher 1994 vintage.
TEL / TOKYO ELECTRON TE 7500M is a high-end etcher/asher equipment designed for precision, high-efficiency etching and ashing of materials such as silicon, GaAs, and AlAs. The system is based on an advanced multi-step technique, where the surface to be processed is subjected to multiple, sequential etching and/or ashing steps. The result is accurate, repeatable processing that is designed to provide the highest yields with lowest contaminants. TEL TE 7500M is outfitted with a host of advanced features that make it a powerful, reliable, and easy-to-use solution for etching and ashing needs. Its multi-wafer cassette loading unit and automated transfer capabilities reduce operator handling, while the auto-lock substrate holder ensures accurate alignment and traceability of substrate loads. The machine is also equipped with an intuitive, easy-to-navigate graphical user interface with full setup, monitoring, and control functions. TOKYO ELECTRON TE 7500M's etching and ashing capabilities are top-of-the-line. It provides intelligent, sophisticated process control systems to help optimize productivity and yield, with selectable force controlled wet etching, high throughput dry etching, and noble gas ashing. Additionally, the tool includes global geometrical correction for uniform etch depth, along with advanced chemical and mass balance monitoring and adjustment, to ensure accurate process results. TE 7500M features a vacuum transfer asset that boasts a chemical pump and built-in mechanical pump, along with an in-situ monitor that can monitor and adjust chemical, process, and vacuum parameters to ensure high product quality. Additional features such as configuration templates, scheduling mode, and on-line recipe modification, make TEL / TOKYO ELECTRON TE 7500M an ideal device for advanced etching and ashing needs. Overall, TEL TE 7500M provides an ideal solution for etching and ashing tasks that require accuracy and dependability. With its advanced features, reliable processes, and intuitive user interface, this model is designed to provide superior performance and efficiencies, while minimizing waste and achieving the highest yields.
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