Used TEL / TOKYO ELECTRON TE 7500M #293610453 for sale

ID: 293610453
Wafer Size: 6"
Vintage: 1994
Oxide etcher, 6" 1994 vintage.
TEL / TOKYO ELECTRON TE 7500M etch/aspher is an advanced-technology equipment designed for etching and ashing a wide range of sample materials. It is designed to provide precision etching of complex patterns using reactive ion etching technology. As the most advanced etcher/asher in TEL lineup, TEL TE 7500M provides reliable performance with unmatched precision and uniformity in etching and ashing results. TOKYO ELECTRON TE 7500M is configured with an advanced 8-stage process controller and vacuum controller, allowing for precise control of etching and ashing rates as well as accurate temperature and pressure control. The system is composed of a powerful etching chamber, a dual-zone quartz tank, and an exhaust chimney. The chamber is designed to provide a clean, reliable, and uniform etching/ashing process, while a two-zone quartz tank and an exhaust chimney ensure efficient exhaust of by-products. In addition, a variety of sample holders and electrodes are available, allowing for efficient etching/ashing of various materials. TE 7500M provides the user with a variety of programmable functions, allowing for user-defined settings for etching and ashing rates, temperature, pressure, and other parameters. The unit also provides a wide range of safety features, ensuring reliable and safe operation of the etcher/asher. The chamber is equipped with an interlock machine that can be used to prevent accidental operation of the chamber if power supply to the tool is interrupted. TEL / TOKYO ELECTRON TE 7500M is designed to be easy-to-use and efficient, while providing superior process capability. An intuitive operating asset is accompanied by a touch-panel interface which allows the user to select processes, enter settings, and track job progress. TEL TE 7500M also features an advanced self-diagnosis function which can detect potential problems quickly and provide warning messages and diagnostics. TOKYO ELECTRON TE 7500M is an efficient, reliable, and user-friendly solution for etching and ashing. It provides superior performance, precision, and uniformity in etching and ashing results, while ensuring a safe and reliable operation. TE 7500M is the ideal choice for research and commercial applications which require precision etching and ashing.
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