Used TEL / TOKYO ELECTRON TE 8400 #9051322 for sale

TEL / TOKYO ELECTRON TE 8400
ID: 9051322
Wafer Size: 8"
Vintage: 1992
Oxide etcher, 8", 1992 vintage.
TEL / TOKYO ELECTRON TE 8400 is an etcher/asher designed to precisely shape and process semiconductor and other substrates. TEL TE 8400 is a wet etch equipment capable of etching dies, diodes, and other digital integrated circuits. The system is equipped with a contactless, wafer-to-wafer handling unit and a 7-face plasma/chemical delivery machine for accurate patterning processes. TOKYO ELECTRON TE 8400 supports a wide variety of processes including etch, photolithography, resist stripping, and metal deposition. The tool utilizes an ionized source gas, such as chlorine or fluorine, to produce a precise plasma to etch into the wafer. The gas is combines with a radio frequency (RF) signal to generate a plasma that can etch or deposit additional material on the wafer surface. Additionally, TE 8400 uses a chemical station to strengthen etch power and reduce etch process time. The asset is configured with high-end features, such as oxide anti-reflection (AR) coating, tunnel cleaning, spacer bypass, and etch selectivity optimization. The AR coating reduces reflectivity from the wafer surface to ensure accurate micro-patterns. The tunnel cleaning reduces by-products of etching processes by removing undesired contaminants that develop toward the etch end point. The spacer bypass removes the need for conventional hard mask spacers and allows users to directly pattern etch features. Lastly, the etch selectivity optimization helps improve process repeatability and reduces sensitivity to process variations. TEL / TOKYO ELECTRON TE 8400 is equipped with advanced safety features, including self-diagnostics, sensors, alarms, and security locks. The self-diagnostics feature monitors model health and performance, ensuring optimal operation of the machine. The sensors monitor external process conditions to ensure accurate etch processes. The alarm equipment alerts operators if any unsafe conditions are detected. Finally, the security lock system ensures only authorized personnel can access the unit. Overall, TEL TE 8400 is a sophisticated etcher/asher well-suited for demanding semiconductor and other substrate products. The machine's advanced engineering and features provide users with precise and repeatable etch processes and improved safety and security.
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