Used TEL / TOKYO ELECTRON TE 8401 #293758823 for sale

TEL / TOKYO ELECTRON TE 8401 is a chemically enhanced etching equipment that utilizes a series of intelligent, automated processes to etch complex circuit geometries in semiconducting materials. It features patented etch process technologies that ensure accurate etch results and eliminates the need for manual design. The system has a top-loading vacuum chamber that houses two self-aligning sub platen units, one that supports the substrate and the other that supports the mask or pattern. The self-aligning clamping plates make sure that the material remains securely bonded during the etching process and can be adjusted in increments of 0.01 mm to keep the accuracy of the results. The substrate is secured using electrostatic pins in an electrostatic chuck or other similar methods for easy and accurate positioning. There are two etching plasma sources available with TEL TE 8401, a 410 MHz RF generator and a 2.45 GHz Resonator, both based on the cyclotron principle. The cycle time for etching a single material is adjustable, allowing for low-temperature etching for high-resolution processing or high-temperature etching for faster throughput. The unit features an advanced plasma control machine which includes an on-board design database and an advanced diagnostic tool, which includes ionization ratio measurements and ion flux estimation, to ensure accurate processing. TOKYO ELECTRON TE-8401 also features thermal performance monitoring and asset health monitoring, with indicators and warning alerts ensuring optimal performance. In addition, the model has integrated safety features that prevent combustible, explosive and noxious gases from entering the etching chamber, as well as temperature and pressure control that maintains an optimal operating temperature and pressure. Overall, TE-8401 is a reliable, powerful and accurate etching equipment, ideal for creating high-resolution precision circuitry for a wide range of applications. It's patented etch process technologies, advanced plasma control and safety features make it an invaluable tool for the production of robust and expanding intricate circuitry.