Used TEL / TOKYO ELECTRON TE 8401 #9134027 for sale

TEL / TOKYO ELECTRON TE 8401 is a highly advanced etcher/asher equipment for dry etching and wafer ashing. Built with a groundbreaking closed-type design, it provides superior processing performance and quality while guaranteeing environmental safety and reducing labor costs. TEL TE 8401 features a high-performance etching power supply that ensures ideal etching conditions, regardless of substrate material or feature size. It also has Real-Time Clustering DiseaseTARGET, an exclusive computer-controlled etching operation system that minimizes process-to-process variations. This unit maintains a high level of etching reproducibility, providing a consistent etching quality on every substrate. The advanced ashing technologies included in TOKYO ELECTRON TE-8401 provide excellent particle-free ashing results. It also features a wide range of treatments for substrates such as thermal treatments, sacrificial pattering, and ion-beam irradiation as required. In addition, to ensure safe operation, TEL TE-8401 includes a safety machine using closed-tool inert gases which ensures no hazardous material leakage. The cover of the safety asset is equipped with an alarm model which triggers an alert in case a gas leak is detected. This ensures no harm to operators and the environment. TE 8401 also has an advanced software package called AUTOSET which allows operators to program any recipe parameters and easily store and reproduce them as required. This greatly simplifies recipe handling and increases productivity. To improve overall maintenance and life of the equipment, TOKYO ELECTRON TE 8401 includes an automatic cleaning function which provides easy-to-handle cleaning operations at predetermined intervals. This further ensures flawless quality of every wafer processed in the machine. As a result, TE-8401 is the premier etching and wafer ashing system providing superior processing performance and quality, while ensuring environmental safety and reducing labor costs.