Used TEL / TOKYO ELECTRON TE 8401 #9238869 for sale

TEL / TOKYO ELECTRON TE 8401
ID: 9238869
SiN Dry etcher.
TEL / TOKYO ELECTRON TE 8401 etcher/asher is a state-of-the-art tool designed to provide superior etch and ashing performance. It offers powerful, precise control over the etching and ashing processes used in a wide range of advanced electronic products. The 8401 offers industry-leading features including an automated autodial capability, a large chamber, automated wafer orientation and alignment, and an advanced user interface. The heavy-duty 8401 provides two independent etch and ashing capabilities, allowing for simultaneous etch and ashing of multiple surfaces or products. The tool's large chamber accommodates up to 8-inch wafers and 40-inch wafer packs. A wafer holder and motor drive provide precise wafer alignment and orientation. The autodestruct process automatically sets the proper time and temperature parameters for best results. The 8401's advanced user interface makes it easy to program and control the complex etch and ashing operations. The clever user interface and intuitive diagnostic protocol provide the user with the precise control and accuracy needed for optimal performance. The user-friendly design allows for quick and accurate setups, as well as speedy troubleshooting. The 8401 also features an advanced plasma etcher, a unique feature designed to optimize the timing and temperature requirements for etching in the deepest recesses of electronic parts. An audio alarm informs operators of key process parameters, and heaters and fans are also featured. The 8401 etch/Asher exemplifies TEL commitment to providing cutting-edge technology for the advanced electronics market. The state-of-the-art design ensures superior control and accuracy of etching and ashing processes, as well as top of the line performance and reliability. The 8401 is an ideal solution for high-volume etching and ashing of advanced electronic products.
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