Used TEL / TOKYO ELECTRON TE 8401 #9412380 for sale

TEL / TOKYO ELECTRON TE 8401 is a type of etcher/asher machine used in the semiconductor fabrication process. It is a high-precision tool designed to etch and convey patterned wafers from the lithography phase to the deposition phase. TEL TE 8401 boasts several impressive features, including precision interferometry for precise etch depth control and integrated alignment sensors for substrate positioning accuracy. The machine also has a large chamber for even etching of large area substrates. Additionally, TOKYO ELECTRON TE-8401 has a clean dry etch chamber that reduces particles, leading to better process control and improved yield reliability. Moreover, TEL / TOKYO ELECTRON TE-8401 is highly versatile and can be used with multiple process chemistries like HF, HF/CXF, FOSR, and ICP etch. It also supports a variety of different substrate sizes up to 4-inch and possesses precise process monitoring and control using an advanced control platform. In addition to its precise etching capabilities, TEL TE-8401 also comes equipped with shock-free transfer components and a custom multi-point transfer mechanism to minimize damage to the substrate surfaces. This further increases the yield rate by ensuring that the substrates are protected from contamination and stress. TE-8401 is a very reliable and precise etching and ashing tool specifically designed for the semiconductor fabrication process. Its excellent control platform and shock-free transfer mechanism allow for the highest yield rate possible. It is an excellent addition to any semiconductor facility, and its wide variety of processes and substrate sizes make it even more versatile and reliable.