Used TEL / TOKYO ELECTRON TE 8500 ATC #9016196 for sale

TEL / TOKYO ELECTRON TE 8500 ATC is a state-of-the-art etcher/asher equipment used for high-precision patterning on a wide variety of substrates. It combines a vacuum deposition system, substrate heating, incremental line width control, and other advanced features to deliver exceptional etching and ashing performance. The unit is designed to accommodate substrates of up to 314 mm and can accommodate drawings up to 256 mm wide. The vacuum deposition machine is a highly efficient process where multiple layers of materials are deposited on the substrate according to their needs. This is done using a high-voltage DC source and a filament terminal that heat a target material to induce evaporation or sputtering of the material onto the substrate. The source material is then melted or vaporized at the substrate temperature by a pressure gradient assisted by an electron beam. This ensures a precise, uniform, and repeatable deposition of multiple layers on the substrate. TEL TE 8500 ATC features an advanced Automatic Step Control (ASTC) tool that can precisely control line widths and layer thicknesses across the entire sample. This asset works by constantly monitoring the etch rate and adjusting the etch depth to maintain a uniform thickness for all the pattern layers on the substrate. With this model, line widths as small as 50nm can be consistently achieved. The ASTC equipment also allows for rapid switching between etch and ash processes, without the need for manual intervention. In addition, the TE 8500 is equipped with an optical emission spectroscopy (OES) system which uses a laser to generate a beam that is scattered off the substrate surface. This scattered light is then sent through an optical filter and measured to determine the etching or ashing depth of the processing layer. This process allows for a fine-tuned control over the pattern widths. TOKYO ELECTRON TE 8500 ATC unit is suitable for a variety of industries, such as printed circuit boards, displays, nano-electronics, and semiconductor fabrication. Its powerful combination of high-precision patterning, easy operation, and automated controls make it an excellent choice for any application requiring precise etching or ashing. The machine is available with either vertical or horizontal mounting options, allowing for increased flexibility and integration in a wide variety of processes.