Used TEL / TOKYO ELECTRON TE 8500 ATC #9148201 for sale

TEL / TOKYO ELECTRON TE 8500 ATC is an etcher / asher designed with the latest industry-leading technology to provide advanced processing performance. The machine is equipped with a single pedestal, allowing it to process up to 8500 wafers per hour, while meeting tight surface and edge profile specifications required for advanced device processing. Additionally, the equipment can be configured for either wet or dry process etching. Its advanced in-situ sensors are designed to accurately detect and optimize the etching and ashing process in order to maximize etching / ashing performance and to minimize particle generation. The system is also equipped with an advanced cleaning function, which helps to ensure quality of the etching and ashing process. The machine also features a layer thickness monitor that can detect the level of residue left on the wafer after etching or ashing, preventing accidental over-etching or over-ashing. By constantly monitoring the duration and quality of the etching or ashing process, it can maintain consistent etching / ashing speed, giving users a reliable and repeatable etching / ashing feature. TEL TE 8500 ATC is a fully automated unit designed for ease of operation. It can be programmed to perform etching or ashing for specific applications and materials, and automatically stores data for process and performance analyses for faster, more accurate results. The machine also features a high throughput connectivity option, making it easy to connect with other TE systems for semiconductor production automation. Overall, TOKYO ELECTRON TE 8500 ATC provides advanced etching / ashing performance with highly repeatable and reliable results.