Used TEL / TOKYO ELECTRON TE 8500 ESC #9266608 for sale

TEL / TOKYO ELECTRON TE 8500 ESC
ID: 9266608
Wafer Size: 6"
Vintage: 1993
Oxide dry etcher, 6" 1993 vintage.
TEL / TOKYO ELECTRON TE 8500 ESC is an advanced etcher/asher designed for the highest precision etching and ashing processes. The equipment is designed for use in a variety of applications and industries, from the laboratory to manufacturing. TEL TE 8500 ESC utilizes a difference process chamber to create precise etching and ashing capabilities. The differences process chamber is split into separate process and exhaust chambers, which are separated by a plasma shield. This arrangement offers superior cleanliness, high speed, and uniformity in etching and ashing processes. TOKYO ELECTRON TE 8500 ESC offers a range of features designed to deliver highly precise etching and ashing processes. The system is capable of direct and indirect wafer transfers to ensure maximum yield. A real-time error recognition unit is also integrated to protect against physical damage to the wafer or the machine itself. The tool is also capable of supporting a range of etching and ashing processes, such as ionized physical vapor deposition (PVD), chemical vapor deposition (CVD), vacuum ultraviolet (VUV), and resistive ashing. These processes offer a range of precision options and can be tuned to the specific requirements of the user. TE 8500 ESC can also be customised to particular applications and can be upgraded with additional features, such as onboard cooling systems for increased precision. In addition, the asset is easy to use and requires minimal maintenance, making it ideal for busy laboratory and industrial environments. Overall, TEL / TOKYO ELECTRON TE 8500 ESC is an advanced etcher/asher that offers superior precision and performance. The model supports a range of etching and ashing processes, offers direct and indirect wafer transfers, and can be customised to fit the requirements of a particular application. Furthermore, the equipment is easy to use and requires minimal maintenance, making it suitable for busy laboratory and industrial environments.
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